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Multicomponent garnet film scintillators for SEM electron detectors
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SYSNO ASEP 0465105 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Multicomponent garnet film scintillators for SEM electron detectors Author(s) Schauer, Petr (UPT-D) RID, SAI, ORCID
Lalinský, Ondřej (UPT-D) RID, ORCID, SAI
Lučeničová, Z. (CZ)
Kučera, M. (CZ)Number of authors 4 Source Title EMC2016. The 16th European Microscopy Congress. Proceedings. - Oxford : Wiley, 2016 - ISBN 9783527808465 Pages s. 374-375 Number of pages 2 s. Publication form Online - E Action EMC2016. European Microscopy Congress /16./ Event date 28.08.2016 - 02.09.2016 VEvent location Lyon Country FR - France Event type WRD Language eng - English Country GB - United Kingdom Keywords electron detector ; epitaxial film ; GAGG:Ce ; multicomponent garnet ; scintillator ; SEM Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GA16-05631S GA ČR - Czech Science Foundation (CSF) TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR) LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 DOI https://doi.org/10.1002/9783527808465.EMC2016.5236 Annotation With an Everhart-Thornley (ET) scintillation detector in SEM, an image is formed by signal electrons emerged after an interaction of focused scanning electron beam with the specimen surface. In such a case a scintillator plays an important role as a fast electron-photon signal conversion element. A selection of fast scintillation materials is very limited, because the only mechanism for scintillators applicable in SEM ET detectors consists in allowed 5d-4f transitions in lanthanide ions. Unfortunately, the widely used Czochralski grown single crystal YAG:Ce scintillators suffer from an afterglow, which deteriorate the ability to transfer high image contrast. The mentioned afterglow in the bulk single crystal is caused by inevitable structural defects, such as antisite defects. These trap states are responsible not only for delayed radiative recombination causing the afterglow, but also for a degradation of the light yield. The aim of this study is to introduce new multicomponent garnet film scintillators for SEM electron detectors that due to the substitution of Al by Ga in the Gd3Al5O12:Ce garnet extensively supress the shallow traps resulting in a significant increase of the cathodoluminescence (CL) efficiency and in improvement of the afterglow characteristics. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2017
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