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Ion-implantation of erbium to the nanocrystalline diamond thin films
- 1.0465018 - FZÚ 2017 RIV RO eng J - Journal Article
Nekvindová, P. - Babchenko, Oleg - Cajzl, J. - Kromka, Alexander - Macková, Anna - Malinský, Petr - Oswald, Jiří - Prajzler, Václav - Remeš, Zdeněk - Varga, Marián
Ion-implantation of erbium to the nanocrystalline diamond thin films.
Journal of Optoelectronics and Advanced Materials. Roč. 18, 7-8 (2016), s. 679-684. ISSN 1454-4164. E-ISSN 1841-7132
R&D Projects: GA ČR(CZ) GA14-05053S; GA MŠMT(CZ) LM2011019
Institutional support: RVO:68378271 ; RVO:61389005
Keywords : nanocrystalline diamond * optical waveguides * erbium * luminescence * ion implantation * CVD
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 0.449, year: 2016
High-refractive-index nanocrystalline diamond films deposited on borosilicate glass from a CH4/CO2/H2 gas mixture by a linear-antenna microwave plasma-enhanced chemical vapour deposition (MW PECVD) were doped by erbium using ion- implantation technique. The prepared thin films guided an optical signal in the range of 632–1552 nm and revealed measurable luminescence around 1530 nm. The changes of optical properties and surface morphology were studied more
in detail.
Permanent Link: http://hdl.handle.net/11104/0263755
Number of the records: 1