Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures

0464869 - ÚJF 2017 RIV NL eng J - Journal Article
Mayer, M. - Malinský, Petr - Schiettekatte, F. - Zolnai, Z.
Intercomparison of ion beam analysis software for the simulation of backscattering spectra from two-dimensional structures.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 385, OCT (2016), s. 65-73. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA ČR(CZ) GBP108/12/G108
Institutional support: RVO:61389005
Keywords : ion beam analysis * computer simulation
Subject RIV: BG - Nuclear, Atomic and Molecular Physics, Colliders
Impact factor: 1.109, year: 2016

The codes RBS-MAST, STRUCTNRA, F95-Rough and CORTEO are simulation codes for ion beam analysis spectra from two-or three-dimensional sample structures. The codes were intercompared in a code code comparison using an idealized grating structure and by comparison to experimental data from a silicon grating on tantalum interlayer. All codes are in excellent agreement at higher incident energies and not too large energy losses. At lower incident energies, grazing angles of incidence and/or larger energy losses plural scattering effects play an increasing role. Simulation codes with plural scattering capabilities offer higher accuracy and better agreement to experimental results in this regime.
Permanent Link: http://hdl.handle.net/11104/0263624