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Nanopatterning of Silicon Nitride Membranes
- 1.Matějka, M., Krátký, S., Řiháček, T., Kolařík, V., Chlumská, J., Urbánek, M. Nanopatterning of Silicon Nitride Membranes. In: NANOCON 2016. 8th International Conference on Nanomaterials - Research and Application. Conference Proceedings. Ostrava: Tanger, 2017, s. 709-714. ISBN 978-80-87294-71-0.
Number of the records: 1