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Comparison of SIMS and RBS for depth profiling of silica glasses implanted with metal ions
- 1.LORINČÍK, Jan, VESELÁ, D., VYTYKÁČOVÁ, S., ŠVECOVÁ, B., NEKVINDOVÁ, P., MACKOVÁ, Anna, MIKŠOVÁ, Romana, MALINSKÝ, Petr, BOETTGER, R. Comparison of SIMS and RBS for depth profiling of silica glasses implanted with metal ions. Journal of Vacuum Science & Technology B. 2016, 34(3), 03H129. ISSN 1071-1023. E-ISSN 2166-2754. Available: https://doi.org/10.1116/1.4944525
Number of the records: 1