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Computer simulation of RBS spectra from samples with surface roughness
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SYSNO ASEP 0459132 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Computer simulation of RBS spectra from samples with surface roughness Author(s) Malinský, Petr (UJF-V) RID, ORCID, SAI
Hnatowicz, Vladimír (UJF-V) RID
Macková, Anna (UJF-V) RID, ORCID, SAINumber of authors 3 Source Title Nuclear Instruments & Methods in Physics Research Section B. - : Elsevier - ISSN 0168-583X
Roč. 371, MAR (2016), s. 101-105Number of pages 5 s. Publication form Print - P Action 22nd International conference on Ion Beam Analysis (IBA) Event date 14.06.2015 - 19.06.2015 VEvent location Opatija Country HR - Croatia Event type WRD Language eng - English Country NL - Netherlands Keywords computer simulation ; Rutherford backscattering ; surface roughness Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders R&D Projects LM2011019 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) GA15-01602S GA ČR - Czech Science Foundation (CSF) Institutional support UJF-V - RVO:61389005 UT WOS 000373412000019 EID SCOPUS 84960242202 DOI 10.1016/j.nimb.2015.10.001 Annotation A fast code for the simulation of common RBS spectra including surface roughness effects has been written and tested on virtual samples comprising either a rough layer deposited on a smooth substrate or smooth layer deposited on a rough substrate and simulated at different geometries. The sample surface or interface relief has been described by a polyline and the simulated RBS spectrum has been obtained as the sum of many particular spectra from randomly chosen particle trajectories. The code includes several procedures generating virtual samples with random and regular (periodical) roughness. The shape of the RBS spectra has been found to change strongly with increasing sample roughness and an increasing angle of the incoming ion beam. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2017
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