Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope

Number of the records: 1

1.

SYSNO ASEP	0451582
Document Type	J - Journal Article
R&D Document Type	Journal Article
Subsidiary J	Ostatní články
Title	Wave Optical Calculation of Probe Size in Low Energy Scanning Electron Microscope
Author(s)	Radlička, Tomáš (UPT-D)_{RID, ORCID, SAI}
Number of authors	1
Source Title	Microscopy and Microanalysis. - : Cambridge University Press - ISSN 1431-9276 Roč. 21, S4 (2015), s. 212-217
Number of pages	6 s.
Publication form	Print - P
Language	eng - English
Country	US - United States
Keywords	scanning electron microscope ; optical calculation
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
R&D Projects	LO1212 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
Institutional support	UPT-D - RVO:68081731
DOI	10.1017/S1431927615013392
Annotation	A wave optical calculation of the probe size of a low energy scanning electron microscope is presented. The resolution for the optimal aperture was computed and compared with results of standard approaches. The effect of deflection aberrations is also considered, and it was found to be critical for the landing energies below 5eV and fields of view larger than 100 x 100 pím2.
Workplace	Institute of Scientific Instruments
Contact	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Year of Publishing	2016

Number of the records: 1