Number of the records: 1
Contamination of magnetron sputtered metallic films by oxygen from residual atmosphere in deposition chamber
- 1.
SYSNO ASEP 0449004 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Contamination of magnetron sputtered metallic films by oxygen from residual atmosphere in deposition chamber Author(s) Pokorný, Petr (FZU-D) RID, ORCID, SAI
Musil, Jindřich (FZU-D) RID, ORCID
Fitl, Přemysl (FZU-D) RID, ORCID
Novotný, Michal (FZU-D) RID, ORCID, SAI
Lančok, Ján (FZU-D) RID, ORCID
Bulíř, Jiří (FZU-D) RID, ORCID, SAISource Title Plasma Processes and Polymers. - : Wiley - ISSN 1612-8850
Roč. 12, č. 5 (2015), s. 416-421Number of pages 6 s. Language eng - English Country DE - Germany Keywords contamination ; low-pressure discharges ; magnetron ; metallic films ; sputtering Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GAP108/11/1298 GA ČR - Czech Science Foundation (CSF) GAP108/11/1312 GA ČR - Czech Science Foundation (CSF) GAP108/11/0958 GA ČR - Czech Science Foundation (CSF) GA14-10279S GA ČR - Czech Science Foundation (CSF) Institutional support FZU-D - RVO:68378271 UT WOS 000354622600002 EID SCOPUS 84929512249 DOI 10.1002/ppap.201400172 Annotation The article reports on the contamination of Ag thin films sputtered from a pure Ag target in Ar and Ne gas by the RF magnetron by gas atoms contained in residual gas atmosphere in the deposition chamber at different values of the base pressure. The amount of O atoms generated at different values of base pressure is compared with the amount of Ag atoms sputtered at different deposition rates of Ag film. This comparison reveals a great problem in the formation of pure metallic films at low deposition rates and high values of the base pressure. No pure Ag films can be deposited at low in deposition chambers evacuated with diffusion or root pumps to the base pressures lower than 1mPa only. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2016
Number of the records: 1