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Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS
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SYSNO ASEP 0442464 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Imaging of dopant distribution in optical fibers with an orthogonal TOF SIMS Author(s) Lorinčík, Jan (URE-Y)
Kašík, Ivan (URE-Y) RID
Vaniš, Jan (URE-Y) RID
Sedláček, L. (CZ)
Dluhoš, J. (CZ)Number of authors 5 Source Title Surface and Interface Analysis. - : Wiley - ISSN 0142-2421
Roč. 46, č. 1 (2014), s. 238-240Number of pages 3 s. Publication form Print - P Action 19th International Conference on Secondary Ion Mass Spectrometry (SIMS) Event date 29.09.2013-04.10.2013 VEvent location Jeju Country KR - Korea, Republic of Event type WRD Language eng - English Country GB - United Kingdom Keywords TOF SIMS ; Optical fibers ; Dopant Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering Institutional support URE-Y - RVO:67985882 UT WOS 000345696200059 EID SCOPUS 84912044413 DOI 10.1002/sia.5536 Annotation The analysis of doping element distribution in optical fiber cross sections requires a sensitive high spatial resolution technique. We demonstrate that a compact orthogonal Time-of-Flight (TOF) mass spectrometer attached to a multitechnique FIB-SEM-EDX system can be used to analyze cross sections of as manufactured optical fibers. By performing quantitative Energy Dispersive X-Ray (EDX) analysis of the optical preform, from which the fibers were drawn, we obtained conversion factors, which enabled the quantification of the Focused Ion Beam(FIB) SIMS profiles of the fiber cross sections Workplace Institute of Radio Engineering and Electronics Contact Petr Vacek, vacek@ufe.cz, Tel.: 266 773 413, 266 773 438, 266 773 488 Year of Publishing 2015
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