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Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation
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SYSNO ASEP 0441107 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Periodic nanostructures self-formed on silicon and silicon carbide by femtosecond laser irradiation Author(s) Gemini, Laura (FZU-D) RID
Hashida, M. (JP)
Shimizu, M. (JP)
Miyasaka, Y. (JP)
Inoue, S. (JP)
Tokita, S. (JP)
Limpouch, J. (CZ)
Mocek, Tomáš (FZU-D) RID, ORCID, SAI
Sakabe, S. (JP)Source Title Applied Physics A - Materials Science & Processing. - : Springer - ISSN 0947-8396
Roč. 117, č. 1 (2014), s. 49-54Number of pages 6 s. Language eng - English Country DE - Germany Keywords coulomb explosion ; ablation ; surfaces ; metals ; pulses ; semiconductors ; fabrication ; thresholds ; picosecond Subject RIV BH - Optics, Masers, Lasers R&D Projects ED2.1.00/01.0027 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) EE2.3.20.0143 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) LG13029 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support FZU-D - RVO:68378271 UT WOS 000342281800009 EID SCOPUS 84919879775 DOI 10.1007/s00339-014-8502-4 Annotation Laser-induced periodic surface structures (LIPSS) were formed on Si and SiC surfaces by irradiations with femtosecond laser pulses in air. Different kinds of self-organized structures appeared on Si and SiC at laser fluences slightly higher than the damage threshold, which was measured by confocal laser scanning microscope. Thecharacteristic spatial periodicity of every observed structure was estimated reading the peak values of the 2D Fourier transform power spectra obtained from SEM images. The evolution of the spatial periodicity was finally tudied with respect to both the laser fluence and the number of laser pulses. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2015
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