Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films

OLEJNÍČEK, J., HUBIČKA, Z., KOHOUT, M., KŠÍROVÁ, P., BRUNCLÍKOVÁ, M., KMENT, Š., ČADA, M., DARVEAU, S.A., EXSTROM, C.L. Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films. In: IEEE Photovoltaic Specialist Conference (PVSC 2014) /40./. New York: IEEE, 2014, s. 1666-1669. ISBN 9781479943982. Available: doi: 10.1109/PVSC.2014.6925239