Olejníček, Jiří - Čada, Martin - Šmíd, Jiří - Kment, Štěpán - Hubička, Zdeněk
Multi-SWD plasma jet system for PECVD deposition of thin films.
IEEE Transactions on Plasma Science. Roč. 42, č. 10 (2014), s. 2502-2503. ISSN 0093-3813. E-ISSN 1939-9375
R&D Projects: GA TA ČR TA01011740; GA MŠMT LH12045
Grant - others:AVČR(CZ) M100101215
Impact factor: 1.101, year: 2014 ; AIS: 0.329, rok: 2014
DOI: https://doi.org/10.1109/TPS.2014.2314214
http://hdl.handle.net/11104/0242111