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Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning
- 1.0437840 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Meluzín, Petr - Horáček, Miroslav - Urbánek, Michal - Bok, Jan - Krátký, Stanislav - Matějka, Milan - Chlumská, Jana - Kolařík, Vladimír
Some Other Gratings: Benchmarks for Large-Area E-Beam Nanopatterning.
NANOCON 2014. 6th International conference proceedings. Ostrava: TANGER, 2014. ISBN 978-80-87294-55-0.
[NANOCON 2014. International Conference /6./. Brno (CZ), 05.11.2014-07.11.2014]
R&D Projects: GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : e-beam writer * optical nano structures * diffraction gratings * fractal gratings
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0241326
Number of the records: 1