High-resolution synchrotron diffraction study of porous buffer InP(001) layers

0436000 - ÚFE 2015 RIV GB eng J - Journal Article
Lomov, A. A. - Punegov, V. I. - Nohavica, Dušan - Chuev, M.A. - Vasiliev, A.L. - Novikov, D. V.
High-resolution synchrotron diffraction study of porous buffer InP(001) layers.
Journal of Applied Crystallography. Roč. 47, č. 5 (2014), s. 1614-1625. ISSN 0021-8898. E-ISSN 1600-5767
Institutional support: RVO:67985882
Keywords : porous layers * X-ray reciprocal space mapping * indium phosphide
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 3.984, year: 2014

X-ray reciprocal space mapping was used for quantitative investigation of porous layers in indium phosphide. A new theoretical model in the frame of the statistical dynamical theory for cylindrical pores was developed and applied for numerical data evaluation. The analysis of reciprocal space maps provided comprehensive information on a wide range of the porous layer parameters, for example, layer thickness and porosity, orientation, and correlation length of segmented pore structures. The results are in a good agreement with scanning electron microscopy data
Permanent Link: http://hdl.handle.net/11104/0239828