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Etching of glass microchips with supercritical water
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SYSNO ASEP 0434366 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Etching of glass microchips with supercritical water Author(s) Karásek, Pavel (UIACH-O) RID, ORCID
Grym, Jakub (UIACH-O)
Roth, Michal (UIACH-O) RID, ORCID
Planeta, Josef (UIACH-O) RID, ORCID
Foret, František (UIACH-O) RID, ORCIDNumber of authors 5 Source Title Lab on a Chip. - : Royal Society of Chemistry - ISSN 1473-0197
Roč. 15, č. 1 (2015), s. 311-318Number of pages 6 s. Publication form Print - P Language eng - English Country GB - United Kingdom Keywords glass microchips ; channel etching ; supercritical water Subject RIV CB - Analytical Chemistry, Separation R&D Projects GAP106/12/0522 GA ČR - Czech Science Foundation (CSF) GBP206/12/G014 GA ČR - Czech Science Foundation (CSF) EE2.3.20.0182 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UIACH-O - RVO:68081715 UT WOS 000346478100036 DOI 10.1039/C4LC00843J Annotation A novel method of etching channels in glass microchips with the most tunable solvent, water, was tested as an alternative to common hydrogen fluoride-containing etchants. Workplace Institute of Analytical Chemistry Contact Iveta Drobníková, drobnikova@iach.cz, Tel.: 532 290 234 Year of Publishing 2015
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