0434109 - ÚPT 2015 RIV CZ eng C - Conference Paper (international conference)
Lalinský, Ondřej - Bok, Jan - Schauer, Petr - Frank, Luděk
Performance of YAG:Ce Scintillators for Low-Energy Electron Detectors in S(T)EM.
18th International Microscopy Congres. Proceedings. Praha: Czechoslovak Microscopy Society, 2014. ISBN 978-80-260-6720-7.
[International Microscopy Congres /18./. Praha (CZ), 07.09.2014-12.09.2014]
R&D Projects: GA TA ČR TE01020118; GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : scintillator * YAG:Ce * single crystal * electron detector * SEM * STEM * low-energy electron * cathodoluminescence
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Cerium activated single crystals of yttrium aluminium garnet (YAG:Ce) Y3-xCexAl5O12 are widely used as scintillators in electron detectors for S(T)EM. Nowadays, it is sometimes necessary to detect low-energy electrons without post-acceleration. In such cases, extremely sensitive detectors are required that are able to detect even electrons with energies of only hundreds of eV while avoiding charging of the scintillator surface. However, commonly used scintillators strongly lose their light yield with the decrease of the incident electron energy. Moreover, a thinner conductive layer on the scintillator surface has to be used to allow low-energy electrons to pass through. Possible charging of the surface negatively affects its cathodoluminescence (CL) light yield. The low-energy electron excitation takes place closer to the scintillator surface where damage can be expected owing to its preparation, which also reduces the CL light yield. The aim was to study the influence of the scintillator and its conductive layer on the low-energy electron detection efficiency.
Permanent Link: http://hdl.handle.net/11104/0238244