Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system

Number of the records: 1

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SYSNO	0432261
Title	Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system
Author(s)	Potocký, Štěpán (FZU-D)_{RID, ORCID} Babchenko, Oleg (FZU-D)_{RID, ORCID} Davydova, Marina (FZU-D)_{RID, ORCID} Ižák, Tibor (FZU-D)_RID Čada, Martin (FZU-D)_{RID, ORCID, SAI} Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Japanese Journal of Applied Physics. Roč. 53, č. 5 (2014), "05FP04-1"-"05FP04-3". - : Institute of Physics Publishing
Document Type	Článek v odborném periodiku
Grant	TA01011740 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
	GAP205/12/0908 GA ČR - Czech Science Foundation (CSF)
	M100100902, CZ - Czech Republic
Institutional support	FZU-D - RVO:68378271
Language	eng
Country	JP
Keywords	antenna linear * CVD system * plasma
Permanent Link	http://hdl.handle.net/11104/0236689

Number of the records: 1