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Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system

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    POTOCKÝ, Štěpán, BABCHENKO, Oleg, DAVYDOVA, Marina, IŽÁK, Tibor, ČADA, Martin, KROMKA, Alexander. Growth of carbon allotropes and plasma characterization in linear antenna microwave plasma CVD system. Japanese Journal of Applied Physics. 2014, 53(5), "05FP04-1"-"05FP04-3". ISSN 0021-4922. E-ISSN 1347-4065. Available: https://doi.org/10.7567/JJAP.53.05FP04
Number of the records: 1  

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