Number of the records: 1
Performances of microwave plasma generation in linear antenna configuration
- 1.0424334 - FZÚ 2014 RIV SK eng C - Conference Paper (international conference)
Potocký, Štěpán - Rezek, Ondřej - Čada, Martin - Babchenko, Oleg - Ižák, Tibor - Varga, Marián - Kromka, Alexander
Performances of microwave plasma generation in linear antenna configuration.
Perspektívne vákuové metódy a technológie (Perspective vacuum methods and technologies). Bratislava: Slovenská vákuová spoločnosť, 2013 - (Vojs, M.; Veselý, M.; Vincze, A.), s. 42-46. ISBN 978-80-971179-2-4.
[School of Vacuum Technology /16./ (Perspektívne vákuové metódy a technológie. Perspective vacuum methods and technologies). Štrbské Pleso (SK), 10.10.2013-13.10.2013]
R&D Projects: GA TA ČR TA01011740; GA ČR GAP205/12/0908
Institutional support: RVO:68378271
Keywords : microwave plasma * linear antena * CVD deposition
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0230415
Number of the records: 1