Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub./N.sub.2./sub. gas chemistry

Number of the records: 1

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SYSNO ASEP	0424202
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H₂/CH₄/CO₂/N₂ gas chemistry
Author(s)	Vojs, M. (SK) Varga, Marián (FZU-D)_{RID, ORCID} Babchenko, Oleg (FZU-D)_{RID, ORCID} Ižák, Tibor (FZU-D)_RID Mikolášek, M. (SK) Marton, M. (SK) Kromka, Alexander (FZU-D)_{RID, ORCID, SAI}
Source Title	Proceedings of 8th Solid State Surfaces and Interfaces. - Bratislava : Comenius University, 2013 / Brunner R. - ISBN 978-80-223-3501-0
Pages	s. 187
Number of pages	1 s.
Publication form	Print - P
Action	Solid State Surfaces and Interfaces /8./
Event date	25.11.2013-28.11.2013
VEvent location	Smolenice
Country	SK - Slovakia
Event type	EUR
Language	eng - English
Country	SK - Slovakia
Keywords	diamond films ; nitrogen doping ; plasma chemistry
Subject RIV	JJ - Other Materials
R&D Projects	GBP108/12/G108 GA ČR - Czech Science Foundation (CSF)
Institutional support	FZU-D - RVO:68378271
Annotation	In this contribution we focused on the detailed study of diamond films grown by pulsed linear antenna microwave plasma chemical vapour deposition from the N2/H2/CH4/CO2 process gas mixture at different concentrations. The changes observed in the plasma chemistry and growth kinetics were discussed.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2014

Number of the records: 1