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Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H.sub.2./sub./CH.sub.4./sub./CO.sub.2./sub./N.sub.2./sub. gas chemistry
- 1.VOJS, M., VARGA, M., BABCHENKO, O., IŽÁK, T., MIKOLÁŠEK, M., MARTON, M., KROMKA, A. Study on diamond films deposited by pulsed linear antenna microwave plasma chemical vapor deposition from H2/CH4/CO2/N2 gas chemistry. In: BRUNNER, R., ed. Proceedings of 8th Solid State Surfaces and Interfaces. Bratislava: Comenius University, 2013, s. 187. ISBN 978-80-223-3501-0.
Number of the records: 1