The precise refractive index of air measuring unit suitable for metrological scanning probe microscope

0422034 - ÚPT 2014 FR eng C - Conference Paper (international conference)
Hucl, Václav - Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Číp, Ondřej
The precise refractive index of air measuring unit suitable for metrological scanning probe microscope.
NanoScale 2013. 10th Seminar on Quantitative Microscopy (QM) and 6th Seminar on Nanoscale Calibration Standards and methods.. Paris: Nanometrology Group, 2013, s. 109.
[NanoScale 2013. Seminar on Quantitative Microscopy (QM) /10./ and Seminar on Nanoscale Calibration Standards and Methods /6./. Paris (FR), 25.04.2013-26.04.2013]
R&D Projects: GA ČR GAP102/10/1813; GA MPO FR-TI2/705; GA MPO FR-TI1/241; GA MŠMT EE2.4.31.0016
Institutional support: RVO:68081731
Keywords : refractive index of air * precise measurement * laser interferometer
Subject RIV: FP - Other Medical Disciplines

In case when a traceable measurement of dimension of samples in scanning probe microscopy is needed the position of the probe tip has to be monitored by a set of laser interferometers. The measurement is done very often under standard atmospheric conditions so the changes of the refractive index of air have an influence to measured values of the length with 1.0exp(-4) relatively. Thus the measurement of the refractive index of air and application of its instantaneous value to all of interferometric measurement axes is necessary.
Permanent Link: http://hdl.handle.net/11104/0228283