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Collection of signal electrons in Low Energy SEM
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SYSNO ASEP 0420975 Document Type C - Proceedings Paper (int. conf.) R&D Document Type The record was not marked in the RIV Title Collection of signal electrons in Low Energy SEM Author(s) Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 2 Source Title Microscopy conference (MC) 2013. Proceedings, 2. - Regensburg : University of Regensburg, 2013 Pages s. 327-328 Number of pages 2 s. Publication form Online - E Action Microscopy Conference 2013 Event date 25.08.2013-30. 08.2013 VEvent location Regensburg Country DE - Germany Event type WRD Language eng - English Country DE - Germany Keywords signal collection ; low energy SEM ; trajectory simulations Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects EE2.4.31.0016 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) Institutional support UPT-D - RVO:68081731 Annotation Modern scanning electron microscopes (SEM) are equipped with a field emission gun and the specimen is usually immersed in a strong magnetic field in order to reach high resolution. Low energy SEM equipped by a beam deceleration system, e.g. cathode lens (CL), can obtain spot size below 10 nm for landing energy of units of eV. Low energy SEM with a cathode lens has to be combined with a focusing lens. Magnetic or immersion-magnetic focusing lenses (with weak or strong magnetic field in the specimen plane, respectively) are used in our simulations. These two alternatives are compared with regard to their influence on signal electrons. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2014
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