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Collection of signal electrons in Low Energy SEM

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    0420975 - ÚPT 2014 DE eng C - Conference Paper (international conference)
    Konvalina, Ivo - Müllerová, Ilona
    Collection of signal electrons in Low Energy SEM.
    Microscopy conference (MC) 2013. Proceedings. Vol. 2. Regensburg: University of Regensburg, 2013, s. 327-328.
    [Microscopy Conference 2013. Regensburg (DE), 25.08.2013-30. 08.2013]
    R&D Projects: GA MŠMT EE2.4.31.0016
    Institutional support: RVO:68081731
    Keywords : signal collection * low energy SEM * trajectory simulations
    Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
    Permanent Link: http://hdl.handle.net/11104/0227433
     
     
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