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Large area growth of functional and electronic-grade diamond thin films - today's reality

  1. 1.
    SYSNO0399675
    TitleLarge area growth of functional and electronic-grade diamond thin films - today's reality
    Author(s) Kromka, Alexander (FZU-D) RID, ORCID, SAI
    Babchenko, Oleg (FZU-D) RID, ORCID
    Ižák, Tibor (FZU-D) RID
    Varga, Marián (FZU-D) RID, ORCID
    Potocký, Štěpán (FZU-D) RID, ORCID
    Rezek, Bohuslav (FZU-D) RID, ORCID
    Source Title Progresívne materiály a vákuum ( Progressive materials and vacuum). S. 11-14. - Bratislava : Slovenská vakuová spolocnosť, 2012 / Varga M. ; Veselý M. ; Vincze A.
    Conference School of Vacuum Technology /15./ ( Progressive materials and vacuum), Štrbské pleso, 08.11.2012-11.11.2012
    Document TypeKonferenční příspěvek (zahraniční konf.)
    Grant GAP108/11/0794 GA ČR - Czech Science Foundation (CSF), CZ - Czech Republic
    GAP108/12/0910 GA ČR - Czech Science Foundation (CSF)
    Institutional supportFZU-D - RVO:68378271
    Languageeng
    CountrySK
    Keywords diamond thin films * large area deposition * linear plasma * pressure
    Permanent Linkhttp://hdl.handle.net/11104/0226900
     
Number of the records: 1  

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