Modified knife-edge method for current density distribution measurements in e-beam writers

Number of the records: 1

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SYSNO	0397634
Title	Modified knife-edge method for current density distribution measurements in e-beam writers
Author(s)	Bok, Jan (UPT-D)_RID Kolařík, Vladimír (UPT-D)_{RID, ORCID, SAI} Horáček, Miroslav (UPT-D)_{RID, ORCID, SAI} Matějka, Milan (UPT-D)_{RID, ORCID, SAI} Matějka, František (UPT-D)_{RID, SAI}
Source Title	Journal of Vacuum Science & Technology B. Roč. 31, č. 3 (2013), 031603:1-6. - : American Institute of Physics
Document Type	Článek v odborném periodiku
Grant	ED0017/01/01 GA MŠMT - Ministry of Education, Youth and Sports (MEYS)
	TE01020118 GA TA ČR - Technology Agency of the Czech Republic (TA ČR)
Institutional support	UPT-D - RVO:68081731
Language	eng
Country	US
Keywords	electron-beam * intensity distribution * aperture * detector * profile * size
Permanent Link	http://hdl.handle.net/11104/0225249

Number of the records: 1