Number of the records: 1
Modified knife-edge method for current density distribution measurements in e-beam writers
- 1.Bok, Jan - Kolařík, Vladimír - Horáček, Miroslav - Matějka, Milan - Matějka, František
Modified knife-edge method for current density distribution measurements in e-beam writers.
Journal of Vacuum Science & Technology B. Roč. 31, č. 3 (2013), 031603:1-6. ISSN 1071-1023
Impact factor: 1.358, year: 2013
http://hdl.handle.net/11104/0225249
Number of the records: 1