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Modified knife-edge method for current density distribution measurements in e-beam writers
- 1.Bok, J., Kolařík, V., Horáček, M., Matějka, M., Matějka, F. Modified knife-edge method for current density distribution measurements in e-beam writers. Journal of Vacuum Science & Technology B. 2013, 31(3), 031603:1-6. ISSN 1071-1023. Available: doi: 10.1116/1.4802920
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