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Modified knife-edge method for current density distribution measurements in e-beam writers
- 1.BOK, J., KOLAŘÍK, V., HORÁČEK, M., MATĚJKA, M., MATĚJKA, F. Modified knife-edge method for current density distribution measurements in e-beam writers. Journal of Vacuum Science & Technology B. 2013, 31(3), 031603:1-6. ISSN 1071-1023. Available: doi: 10.1116/1.4802920
Number of the records: 1