Water as a nontraditional agent for microchips customization

0395396 - ÚIACH 2014 HU eng A - Abstract
Karásek, Pavel - Grym, Jakub - Roth, Michal - Planeta, Josef
Water as a nontraditional agent for microchips customization.
9th Balaton Symposium on High-Performance Separation Methods. Veszprém: Hungarian Society for Separation Sciences, 2013. s. 153. ISBN 978-963-89335-2-2.
[Balaton Symposium on High-Performance Separation Methods /9./. 04.09.2013-06.09.2013, Siofók]
R&D Projects: GA ČR(CZ) GBP206/12/G014; GA ČR(CZ) GAP106/12/0522; GA MŠMT(CZ) EE2.3.20.0182
Institutional support: RVO:68081715
Keywords : SCW * microchip * supercritical
Subject RIV: CB - Analytical Chemistry, Separation

This work presents unique properties of supercritical water and posibilities of utilization for microchips manufacturing. The traditional etching mixture based on HF was replaced by sub/supercritical water and channel parameters (wide, depth, surface structure) were studied by laser profilometry and scanning electron microscopy.
Permanent Link: http://hdl.handle.net/11104/0223413