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Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

  1. 1.
    SYSNO0391185
    TitleComposition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
    Author(s) Kleiner, A. (DE)
    Suchaneck, G. (DE)
    Adolphi, B. (DE)
    Gerlach, G. (DE)
    Lavrentiev, V. (RU)
    Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
    Čada, Martin (FZU-D) RID, ORCID, SAI
    Jastrabík, Lubomír (FZU-D) RID, ORCID
    Dejneka, Alexandr (FZU-D) RID, ORCID
    Source Title 2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM). S. 1-3. - New York : IEEE - Institute of Electrical and Electronics Engineers, 2012
    Conference IEEE International Symposium on Applications of Ferroelectrics held jointly with 11th ECAPD and 4th PFM /21./, Aveiro, 09.07.2012-13.07.2012
    Document TypeKonferenční příspěvek (zahraniční konf.)
    CEZAV0Z10100522 - FZU-D (2005-2011)
    Languageeng
    CountryUS
    Keywords PZT * thin film * polymer substrate * XPS * RBS
    Permanent Linkhttp://hdl.handle.net/11104/0220073
     
Number of the records: 1  

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