Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

Kleiner, A.; Suchaneck, G.; Adolphi, B.; Gerlach, G.; Lavrentiev, V.; Hubička, Zdeněk; Čada, Martin; Jastrabík, Lubomír; Dejneka, Alexandr

Number of the records: 1

Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

1.

SYSNO ASEP	0391185
Document Type	C - Proceedings Paper (int. conf.)
R&D Document Type	Conference Paper
Title	Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates
Author(s)	Kleiner, A. (DE) Suchaneck, G. (DE) Adolphi, B. (DE) Gerlach, G. (DE) Lavrentiev, V. (RU) Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI} Čada, Martin (FZU-D)_{RID, ORCID, SAI} Jastrabík, Lubomír (FZU-D)_{RID, ORCID} Dejneka, Alexandr (FZU-D)_{RID, ORCID}
Source Title	2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM). - New York : IEEE - Institute of Electrical and Electronics Engineers, 2012 - ISSN 1099-4734 - ISBN 978-1-4673-2669-8
Pages	s. 1-3
Number of pages	3 s.
Publication form	Print - P
Action	IEEE International Symposium on Applications of Ferroelectrics held jointly with 11th ECAPD and 4th PFM /21./
Event date	09.07.2012-13.07.2012
VEvent location	Aveiro
Country	PT - Portugal
Event type	WRD
Language	eng - English
Country	US - United States
Keywords	PZT ; thin film ; polymer substrate ; XPS ; RBS
Subject RIV	JA - Electronics ; Optoelectronics, Electrical Engineering
CEZ	AV0Z10100522 - FZU-D (2005-2011)
UT WOS	000313016400058
Annotation	In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed.
Workplace	Institute of Physics
Contact	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Year of Publishing	2013

Number of the records: 1