0387342 - FZÚ 2013 RIV CH eng J - Journal Article
Firstov, S. - Kulykovskyy, Valeriy - Rogul, T. - Čtvrtlík, Radim
Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films.
Surface and Coatings Technology. Roč. 206, č. 17 (2012), 3580-3585. ISSN 0257-8972. E-ISSN 1879-3347
Institutional research plan: CEZ:AV0Z10100522
Keywords : nanocrystalline Ti films * sputtering * hardness * elastic modulus * gas impurities
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 1.941, year: 2012 ; AIS: 0.569, rok: 2012
Result website:
http://ac.els-cdn.com/S0257897212001417/1-s2.0-S0257897212001417-main.pdf?_tid=a737cf16-5598-11e2-a9b8-00000aacb35e&acdnat=1357212670_0f5605c7bde441ea

DOI: https://doi.org/10.1016/j.surfcoat.2012.02.039

The results of a study of small additions of oxygen and nitrogen on the structure and mechanical properties of nanocrystalline titanium films obtained by magnetron sputtering are presented. The hardness and elastic modulus were determined by nanoindentaion technique. The film composition and structure were investigated by OES, SEM, XRD. Hardness and elastic modulus of the nanocrystalline films with small content of oxygen at (<= 2 at.%) and nitrogen (<= 1 at.%) remained approximately the same as for nanocrystalline films deposited in pure Ar. Significant growth of hardness from similar to 4 to similar to 10 GPa was observed at the increase of oxygen/nitrogen content up to similar to 6 at.%. It was accompanied by reducing grain size from similar to 85 to similar to 20 nm and growth of compressive stress. The obtained results are explained by changing of the film structure and composition.
Permanent Link: http://hdl.handle.net/11104/0216476