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Overview of SEM developments and potential
- 1.0387264 - ÚPT 2013 RIV GB eng C - Conference Paper (international conference)
Frank, Luděk - Mikmeková, Šárka - Hovorka, Miloš - Pokorná, Zuzana - Müllerová, Ilona
Overview of SEM developments and potential.
EMC 2012. Proceedings of the 15th European Microscopy Congress. vol. 2. Manchester: The Royal Microscopical Society, 2012, s. 121-122. ISBN 978-0-9502463-6-9.
[EMC 2012. European Microscopy Congress /15./. Manchester (US), 16.09.2012-21.09.2012]
R&D Projects: GA ČR GAP108/11/2270
Institutional support: RVO:68081731
Keywords : low energy SEM * multichannel SEM * STEM in SEM
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Scanning electron microscopy has experienced a certain decline in attention paid by instrumentation scientists and developers; however, since about decade ago we have seen a regeneration of interest. Central efforts in SEM developments have moved from illumination problems to detection principles and assemblies and to the interpretation of images.
Permanent Link: http://hdl.handle.net/11104/0216387
Number of the records: 1