Current state and prospects of scintillation materials for detectors in SEM

0386399 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Schauer, Petr - Bok, Jan
Current state and prospects of scintillation materials for detectors in SEM.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 67-68. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA ČR GAP102/10/1410; GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : SEM * scintillation materials
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

The two principal quantities are important for assessing the quality of each imaging system. Firstly, it is the detective quantum efficiency (DQE), which is primarily a measure of image noise. As the DQE is determined by signal to noise ratio (SNR), the efficient and noise-free components are the key to the high DQE. Second, not less important indicator of image quality is also the modulation transfer function (MTF). MTF describes the ability of adjacent pixels to change from black to white in response to patterns of varying spatial frequency, and hence it determines the actual capability to show fine detail, whether with full or reduced contrast. Using a scanning imaging system the fast components are the key to the good MTF. In a scintillation electron detector of scanning electron microscope (SEM) the scintillator is the most crucial component, because it significantly influences both the DQE and MTF. The aim of this study is to assess the scintillation materials suitable for SEM detectors characterized by the both high efficiency and fast decay characteristic.
Permanent Link: http://hdl.handle.net/11104/0215698