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Calculation of difraction aberration using differential algebra
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SYSNO ASEP 0386398 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Calculation of difraction aberration using differential algebra Author(s) Radlička, Tomáš (UPT-D) RID, ORCID, SAI Number of authors 1 Source Title Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. - Brno : Institute of Scientific Instruments AS CR, v.v.i, 2012 / Mika F. - ISBN 978-80-87441-07-7 Pages s. 59-62 Number of pages 4 s. Publication form Print - P Action International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./ Event date 25.06.2012-29.06.2012 VEvent location Skalský dvůr Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords Diffraction in electron optics ; diferential algebra method Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering Institutional support UPT-D - RVO:68081731 Annotation The resolution in light microscopy is limited mainly by the wave length of light. Although the wave length of the electron is several orders Of magnitude smaller than that of light, the wave properties of the electron limit the resolution of scanning electron microscopes as well. It is described by the diffraction on the limiting aperture. While the effect of the diffraction can be reduced by increasing the limiting aperture size, it affects the resolution by increased geometrical and chromatic aberrations, that are more critical in the electron optics than in the light optics. These opposite trends cause that the best resolution is given by an aperture size that balances the effect of the diffraction with the effect of geometric and chromatic aberrations - an optimal aperture. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2013
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