0386392 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Mikmeková, Eliška - Müllerová, Ilona - Sobota, Jaroslav
Observation of high stressed hydrogenated carbon nitride films by SLEEM.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 43-44. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
Institutional support: RVO:68081731
Keywords : SLEEM * hydrogenated carbon nitride films
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Two main factors can lead to losing adhesion in thin sputtered carbon nitride films: high residual stress and absorption of humidity. Basically, two different types of stress can be identified in thin films: compressive stress and tensile stress. Compressive stress can lead to wrinkling and film delamination, and tensile stress can cause the fracturing of thin films. For reactive sputtering of hydrogenated carbon nitride films, the compressive stress is typical. The films were prepared from graphite target (high purity, 99.9999 %) in mixture of nitrogen and hydrogen discharge.
Permanent Link: http://hdl.handle.net/11104/0215692