Electron beam cutting of non-metals

0386387 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Dupák, Libor
Electron beam cutting of non-metals.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 15-16. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : electron beam * cutting of non-metals
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering

Various materials are difficult to cut or drill, e.g. due to their mechanical properties (hardness, fragility). Also, sometimes the required hole shape and dimensions may be difficult to obtain by mechanical machining or the efficiency of such process is low. Electron beam machining is one way to overcome these issue. It is based on the melting and evaporation of the material by the intense electron beam. The presented experiments were performed on the desktop electron beam welder MEBW-60/2, developed at the Institute of Scientific Instruments AS CR, v.v.i. at Brno. It is also manufactured and sold by the Focus GmbH company under licence. In the following experiments, several sets of grooves were prepared, both in quartz glass and AI2O3 ceramics, to find out the influence of various beam parameters on groove dimensions. The experimental conditions were as follows: acceleration voltage 50 kV, beam current 0.1-1 mA, machining speed 2.5-50 mnvs'1.
Permanent Link: http://hdl.handle.net/11104/0215687