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Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization
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SYSNO ASEP 0374830 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Pulsed linear antenna microwave plasma – a step ahead in large area material depositions and surface functionalization Author(s) Kromka, Alexander (FZU-D) RID, ORCID, SAI
Babchenko, Oleg (FZU-D) RID, ORCID
Ižák, Tibor (FZU-D) RID
Potocký, Štěpán (FZU-D) RID, ORCID
Davydova, Marina (FZU-D) RID, ORCID
Neykova, Neda (FZU-D) RID, ORCID
Kozak, Halyna (FZU-D) RID, ORCID
Remeš, Zdeněk (FZU-D) RID, ORCID
Hruška, Karel (FZU-D) RID, ORCID
Rezek, Bohuslav (FZU-D) RID, ORCIDSource Title NANOCON 2011. Conference proceedings. - Ostrava : Tanger Ltd, 2011 - ISBN 978-80-87294-27-7 Pages s. 271-279 Number of pages 9 s. Action NANOCON 2011. International Conference /3./ Event date 21.09.2011-23.09.2011 VEvent location Brno Country CZ - Czech Republic Event type WRD Language eng - English Country CZ - Czech Republic Keywords microwave plasma ; CVD deposition ; diamond ; CNT ; graphene Subject RIV BM - Solid Matter Physics ; Magnetism R&D Projects GAP108/11/0794 GA ČR - Czech Science Foundation (CSF) MEB0810082 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) KAN400100701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) IAAX00100902 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) CEZ AV0Z10100521 - FZU-D (2005-2011) UT WOS 000306686700040 Annotation A technological progress in the large area growth of diamond films and carbon nanotubes by the modified linear antenna MW system is presented. We show a correlation between process parameters and nano- or poly-crystalline film character. A challenging part, diamond coated mirrors or ATR prisms, are shown as multifunctional optical elements suitable for detection of absorbed molecules. Additional positive feature of the presented plasma system is low temperature hydrogen functionalization of diamond films. Finally, we present that combination of pulsed MW plasma with radiofrequency substrate biasing results in growth of oriented CNTs over large area. Workplace Institute of Physics Contact Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579 Year of Publishing 2012
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