Study of thin films of LiNbO.sub.3./sub. using FTIR and Raman spectroscopy

0374556 - FZÚ 2012 RIV US eng C - Conference Paper (international conference)
Zezulová, M. - Jelínek, M. - Železný, Vladimír - Kocourek, Tomáš
Study of thin films of LiNbO₃ using FTIR and Raman spectroscopy.
Photonics, Devices, and Systems V. Bellingham: SPIE, 2011 - (Tománek, P.; Senderáková, D.; Páta, P.), 830611/1-830611/6. Proceedings of SPIE, 8306. ISBN 9780819489531. ISSN 0277-786X.
[International Conference on Photonics, Devices and Systems /7./. Prague (CZ), 24.08.2011-26.08.2011]
R&D Projects: GA ČR GA202/07/0591; GA ČR(CZ) GAP106/10/1477
Institutional research plan: CEZ:AV0Z10100520
Keywords : LiNbO₃ * thin films * FTIR spectroscopy * Raman spectroscopy
Subject RIV: BM - Solid Matter Physics ; Magnetism
http://dx.doi.org/10.1117/12.910590

Lithium niobate (LiNbO3) is a material which can be used in many applications. LiNbO3 thin films were studied for the development of doped planar waveguides using Pulsed Laser Deposition (PLD) method from two targets. The films were deposited by PLD on SiO2/Si and (0001) sapphire substrates at temperatures 650°C, 700°C, 750°C, from one crystalline and two sintered LiNbO3 targets using KrF excimer laser. The film thickness was ~680 nanometers. Two techniques - Fourier Transform Infrared Spectroscopy (FTIR) and Raman Spectroscopy - are used to characterize the dependence of the deposited thin films on the deposition conditions. These methods characterize the materials by monitoring their phonons whose spectra are sensitive to film deposition parameters. Bulk LiNbO3 has rhombohedral crystal structure with two chemical units per primitive cell, it means, that 30 degrees of freedom are distributed between A1 and E irreducible representations.
Permanent Link: http://hdl.handle.net/11104/0207452