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Multiaxis interferometric displacement measurement for local probe microscopy
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SYSNO ASEP 0372559 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Multiaxis interferometric displacement measurement for local probe microscopy Author(s) Lazar, Josef (UPT-D) RID, ORCID, SAI
Hrabina, Jan (UPT-D) RID, ORCID, SAI
Šerý, Mojmír (UPT-D) RID, SAI
Klapetek, P. (CZ)
Číp, Ondřej (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Central European Journal of Physics. - : Central European Science Journals - ISSN 1895-1082
Roč. 10, č. 1 (2012), s. 225-231Number of pages 7 s. Language eng - English Country PL - Poland Keywords interferometry ; nanometrology ; microscopy Subject RIV BH - Optics, Masers, Lasers R&D Projects LC06007 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) KAN311610701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GA102/09/1276 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000297743800028 EID SCOPUS 82555168279 DOI https://doi.org/10.2478/s11534-011-0093-5 Annotation We present an overview of design approaches for nanometrology measuring setups with a focus on interferometry techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control is presented. The system is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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