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Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM
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SYSNO ASEP 0368930 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Ostatní články Title Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM Author(s) Neděla, Vilém (UPT-D) RID, ORCID, SAI
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Lencová, B. (CZ)
Zlámal, J. (CZ)Number of authors 4 Source Title Microscopy and Microanalysis. - : Cambridge University Press - ISSN 1431-9276
Roč. 17, Suppl. 2 (2011), s. 920-921Number of pages 2 s. Language eng - English Country US - United States Keywords variable pressure scanning electron microscopes (VP-SEM) ; AQUASEM II ; simlulation Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects GAP102/10/1410 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z20650511 - UPT-D (2005-2011) DOI 10.1017/S1431927611005472 Annotation High pressure of gas mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
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