Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen

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SYSNO	0368783
Title	Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen
Author(s)	Bursíková, V. (CZ) Sťahel, P. (CZ) Gardelka, T. (CZ) Bochnicek, Z. (CZ) Peřina, Vratislav (UJF-V) [ONF]_RID Havránek, Vladimír (UJF-V) [ONF]_{RID, SAI, ORCID} Mikšová, Romana (UJF-V) [ONF]_{RID, ORCID, SAI}
Source Title	SAPP 18th Symposium on Application of Plasma Processes SAPP XVIII , Workshop on Plasmas as a Planetary. pp.347-pp.402. - Bratislava : Department of Experimental Physics, Faculty of Mathematics,, 2011 / Országh J. ; Papp P. ; Matejčík Š.
Conference	18th Symposium on Application of Plasma Processes and, Vrátna dolina, 15.01.2011-20.01.2011
Document Type	Konferenční příspěvek (zahraniční konf.)
Grant	GA202/07/1669 GA ČR - Czech Science Foundation (CSF)
CEZ	AV0Z10480505 - UJF-V (2005-2011)
Language	eng
Country	SK
Keywords	Spectroscopy * silicon oxide
Permanent Link	http://hdl.handle.net/11104/0203029

Number of the records: 1