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Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen
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SYSNO ASEP 0368783 Document Type C - Proceedings Paper (int. conf.) R&D Document Type Conference Paper Title Thermal Desorption Spectroscopy Study on Diamond-like Carbon Films Modified by Silicon, Oxygen or Nitrogen Author(s) Bursíková, V. (CZ)
Sťahel, P. (CZ)
Gardelka, T. (CZ)
Bochnicek, Z. (CZ)
Peřina, Vratislav (UJF-V) RID
Havránek, Vladimír (UJF-V) RID, SAI, ORCID
Mikšová, Romana (UJF-V) RID, ORCID, SAINumber of authors 7 Source Title SAPP 18th Symposium on Application of Plasma Processes SAPP XVIII , Workshop on Plasmas as a Planetary. - Bratislava : Department of Experimental Physics, Faculty of Mathematics,, 2011 / Országh J. ; Papp P. ; Matejčík Š. - ISBN 978-80-89186-77-8 Pages pp.347-pp.402 Number of pages 55 s. Publication form Print - P Action 18th Symposium on Application of Plasma Processes and Event date 15.01.2011-20.01.2011 VEvent location Vrátna dolina Country SK - Slovakia Event type WRD Language eng - English Country SK - Slovakia Keywords Spectroscopy ; silicon oxide Subject RIV BG - Nuclear, Atomic and Molecular Physics, Colliders R&D Projects GA202/07/1669 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10480505 - UJF-V (2005-2011) Annotation Diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The effect of intrinsic stress on the coating properties was investigated. Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2013
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