Number of the records: 1
Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power
- 1.
SYSNO ASEP 0365318 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power Author(s) Kontarova, S. (CZ)
Peřina, Vratislav (UJF-V) RID
Čech, V. (CZ)Number of authors 3 Source Title Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 205, Suppl.2 (2011), s. 451-454Number of pages 4 s. Language eng - English Country CH - Switzerland Keywords Plasma polymerization ; Multilayer ; Ellipsometry ; Refractive index Subject RIV BL - Plasma and Gas Discharge Physics CEZ AV0Z10480505 - UJF-V (2005-2011) UT WOS 000293258600098 DOI 10.1016/j.surfcoat.2011.01.064 Annotation Hydrogenated amorphous carbon-silicon alloys were prepared from tetravinylsilane monomer using plasma-enhanced chemical vapor deposition at different powers (10-70 W). The optical properties of the plasma polymer films were analyzed by spectroscopic ellipsometry in the range 250-830 nm. The refractive index of pp-TVS films can be controlled by RF power, which for a wavelength of 633 nm ranged from 1.69 (10 W) to 2.08 (70 W). Workplace Nuclear Physics Institute Contact Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Year of Publishing 2013
Number of the records: 1