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In-situ monitoring of the growth of nanostructured aluminum thin film
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SYSNO 0361263 Title In-situ monitoring of the growth of nanostructured aluminum thin film Author(s) Novotný, Michal (FZU-D) RID, ORCID, SAI
Bulíř, Jiří (FZU-D) RID, ORCID, SAI
Lančok, Ján (FZU-D) RID, ORCID
Pokorný, Petr (FZU-D) RID, ORCID, SAI
Bodnár, Michal (FZU-D)Source Title Journal of Nanophotonics. Roč. 5, č. 5 (2011), "051503-1"-"051503-10". - : SPIE - International Society for Optical Engineering Document Type Článek v odborném periodiku Grant IAA100100718 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) IAA100100729 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P324 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country US Keywords aluminum ultrathin film * magnetron sputtering * in-situ monitoring * electrical conductivity * spectral ellipsometry * optical emission spectroscopy Permanent Link http://hdl.handle.net/11104/0198619
Number of the records: 1