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Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs
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SYSNO 0359582 Title Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs Author(s) Straňák, V. (DE)
Drache, S. (DE)
Čada, Martin (FZU-D) RID, ORCID, SAI
Hubička, Zdeněk (FZU-D) RID, ORCID, SAI
Tichý, M. (CZ)
Hippler, R. (DE)Source Title Contributions to Plasma Physics. Roč. 51, 2-3 (2011), s. 237-245. - : Wiley Document Type Článek v odborném periodiku Grant KAN301370701 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) GP202/09/P159 GA ČR - Czech Science Foundation (CSF) KJB100100805 GA AV ČR - Academy of Sciences of the Czech Republic (AV ČR) 1M06002 GA MŠMT - Ministry of Education, Youth and Sports (MEYS), CZ - Czech Republic M100100915 , CZ - Czech Republic GA202/09/0800 GA ČR - Czech Science Foundation (CSF) CEZ AV0Z10100522 - FZU-D (2005-2011) Language eng Country DE Keywords time-resolved plasma diagnostics * optical emission spectroscopy * Langmuir probe * magnetron sputtering Permanent Link http://hdl.handle.net/11104/0197343
Number of the records: 1