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Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs
- 1.STRAŇÁK, V., DRACHE, S., ČADA, Martin, HUBIČKA, Zdeněk, TICHÝ, M., HIPPLER, R. Time-resolved diagnostics of dual high power impulse magnetron sputtering with pulse delays of 15 μs and 500 μs. Contributions to Plasma Physics. 2011, 51(2-3), 237-245. ISSN 0863-1042. E-ISSN 1521-3986. Available: doi: 10.1002/ctpp.201000065
Number of the records: 1