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Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources
- 1.Sobierajski, R., Bruijn, S., Khorsand, A.R., Louis, E., van de Kruijs, R.W.E., Burian, T., Chalupský, J., Cihelka, J., Gleeson, A., Grzonka, J., Gullikson, E.M., Hájková, V., Hau-Riege, S., Juha, L., Jurek, M., Klinger, D., Krzywinski, J., London, R., Pelka, J. B., Płociński, T., Rasiński, M., Tiedtke, K., Toleikis, S., Vyšín, L., Wabnitz, H., Bijkerk, F. Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources. Optics Express. 2011, 19(1), 193-205. ISSN 1094-4087. Available: doi: 10.1364/OE.19.000193
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