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Very low energy scanning electron microscopy
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SYSNO ASEP 0358595 Document Type J - Journal Article R&D Document Type Journal Article Subsidiary J Článek ve WOS Title Very low energy scanning electron microscopy Author(s) Frank, Luděk (UPT-D) RID, SAI, ORCID
Hovorka, Miloš (UPT-D)
Konvalina, Ivo (UPT-D) RID, ORCID, SAI
Mikmeková, Šárka (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDNumber of authors 5 Source Title Nuclear Instruments & Methods in Physics Research Section A. - : Elsevier - ISSN 0168-9002
Roč. 645, č. 1 (2011), s. 46-54Number of pages 9 s. Language eng - English Country NL - Netherlands Keywords scanning electron microscopy ; low energy electrons ; cathode lens ; very low energy STEM ; grain contrast Subject RIV JA - Electronics ; Optoelectronics, Electrical Engineering R&D Projects OE08012 GA MŠMT - Ministry of Education, Youth and Sports (MEYS) CEZ AV0Z20650511 - UPT-D (2005-2011) UT WOS 000292713900011 EID SCOPUS 79958220479 DOI 10.1016/j.nima.2010.12.214 Annotation An overview of recent developments in very low energy scanning electron microscopy is presented. Electron optical aspects are briefly summarized including the low energy beam formation in a cathode lens equipped column, comparison of the sequential and overlapped electric and magnetic fields in the objective lens, and detection issues including extension to the transmitted electron mode as well as to the multichannel detection of signal sorted according to the polar angle of emission. In addition to the acquisition of contrasts specific for the very low energy range, advantages of detection of electrons backscattered to large angles from the surface normal are demonstrated on selected application examples. Workplace Institute of Scientific Instruments Contact Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Year of Publishing 2012
Number of the records: 1